Skip to main content
Log in

Structural investigations of SiO-CeO2 thin films

  • Papers
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

Aspects of the structure of vacuum co-evaporated SiO-CeO2 thin films are elucidated by first presenting the optical transmission edges for a series of such films. These show a differentiation into two distinct groups, and the presence of weak absorption minima, possibly defect-induced, confined to one of these groups. Previously obtained infrared (IR) results are compared with these UV results, and the IR evidence for the O sup0inf1 and O sup1inf3 defect centres associated with oxygen sites is noted. The electron spin resonance (ESR) results for pure a-SiO thin films are then discussed in terms of those of vitreous SiO2, and it is concluded that only O sup0inf1 and O sup+inf3 ESR-related defect centres exist in amorphous SiO films in significant quantities. It is also concluded that adding CeO2 to the films reduces the O sup0inf1 concentrations via chemical bonding, while the O sup+inf3 03 centres remain unaffected. Finally it is shown that the separate identity of any possible defect-induced optical absorption bands in the series from those expected for a-SiO and CeO2 can be used as new evidence for the presence of Si-Ce bonding.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. A. Singh andC. A. Hogarth,J. Mater. Sci. 23 (1987) 1090.

    Google Scholar 

  2. Z. T. Al-Dhhan andC. A. Hogarth,Int. J. Electron. 63 (1987) 707.

    Google Scholar 

  3. A. Razzaq, C. A. Hogarth andK. A. Lott,Phys. Status Solidi (b) 141 (1987) K67.

    Google Scholar 

  4. C. A. Hogarth andZ. T. Al-Dhhan,Phys. Status Solidi (b) 137 (1986) K157.

    Google Scholar 

  5. S. K. J. Al-Ani andJ. Beynon,Phys. Educ. 20 (1985) 274.

    Google Scholar 

  6. J. I. Pankove, “Optical Processes in Semiconductors” (Prentice-Hall, Englewood Cliffs, New Jersey, 1971).

    Google Scholar 

  7. G. A. N. Connell, in “Amorphous Semiconductors” (Topics in Applied Physics, Vol. 36), edited by M. H. Brodsky (Springer, Berlin, New York, 1979) Ch. 4.

    Google Scholar 

  8. M. Kastner,Phys. Rev. Lett. 28 (1972) 355.

    Google Scholar 

  9. E. Mooser andW. B. Pearson, “Progress in Semiconductors,” Vol. 5 (Heywood, London, 1960) p. 104.

    Google Scholar 

  10. M. H. Cohen andV. Heine,Phil. Mag. 7 (1958) 395.

    Google Scholar 

  11. W. Meyer,Z. Elektrochem. 50 (1944) 274.

    Google Scholar 

  12. E. Friederich,Z. Phys. 31 (1925) 813.

    Google Scholar 

  13. Idem, Ibid. 34 (1925) 637.

    Google Scholar 

  14. A. F. Joffé andA. R. Regel,Prog. Semicond. 4 (1960) 237.

    Google Scholar 

  15. H. R. Philipp,J. Phys. Chem. Solids 32 (1971) 1935.

    Google Scholar 

  16. Z. T. Al-Dhhan, private communications (1987).

  17. J. Tauc, R. Grigorovici andA. Vancu,Phys. Status Solidi 15 (1966) 627.

    Google Scholar 

  18. E. A. Davis andN. F. Mott,Phil. Mag. 22 (1970) 903.

    Google Scholar 

  19. D. Wehire andM. F. Thorpe,Phys. Rev. B 4 (1971) 2508.

    Google Scholar 

  20. ,Ibid. 4 (1971) 3518.

    Google Scholar 

  21. E. P. O'Reilly andJ. Robertson,ibid. 27 (1980) 3780.

    Google Scholar 

  22. D. L. Griscom,J. Non-Cryst. Solids 40 (1980) 211.

    Google Scholar 

  23. N. F. Mott,Adv. Phys. 26 (1977) 363.

    Google Scholar 

  24. Idem, J. Non-Cryst. Solids 40 (1980) 1.

    Google Scholar 

  25. G. N. Greaves,Phil. Mag. B 37 (1978) 447.

    Google Scholar 

  26. Idem, J. Non-Cryst. Solids 32 (1979) 295.

    Google Scholar 

  27. G. Lucovsky,Phil. Mag. B 39 (1979) 513.

    Google Scholar 

  28. Idem 41 (1980) 457.

    Google Scholar 

  29. Idem., Phil. Mag. B 39 (1979) 531.

    Google Scholar 

  30. Idem, J. Non-Cryst. Solids 35/36 (1980) 825.

    Google Scholar 

  31. P. W. Anderson,Phys. Rev. Lett. 34 (1975) 953.

    Google Scholar 

  32. R. A. Street andN. F. Mott,ibid. 35 (1975) 1293.

    Google Scholar 

  33. M. Kastner, D. Adler andH. Fritzsche,ibid. 37 (1976) 1504.

    Google Scholar 

  34. M. Kastner andH. Fritzsche,Phil. Mag. B 37 (1978) 199.

    Google Scholar 

  35. D. L. Griscom, in “The Physics of SiO2 and Its Interfaces”, edited by S. T. Pantelides (Pergamon, New York, 1978) p. 232.

    Google Scholar 

  36. G. N. Greaves,Phil Mag. B 37 (1978) 447.

    Google Scholar 

  37. Idem, in “The Physics of SiO2 and Its Interfaces”, edited by S. T. Pantelides (Pergamon, New York, 1978) p. 268.

    Google Scholar 

  38. E. J. Friebele, D. L. Griscom andM. Stapelbroek,Phys. Rev. Lett. 42 (1979) 1346.

    Google Scholar 

  39. D. L. Griscom andE. J. Friebele,Phys. Rev. B 24 (1981) 4896.

    Google Scholar 

  40. K. L. Chopra, “Thin Film Phenomena” (McGraw-Hill,New York, 1969).

    Google Scholar 

  41. N. F. Mott, in “The Physics of SiO2 and Its Interfaces” edited by S. T. Pantelides (Pergamon, New York, 1978) p. 1.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Singh, A., Hogarth, C.A. Structural investigations of SiO-CeO2 thin films. J Mater Sci 23, 1758–1763 (1988). https://doi.org/10.1007/BF01115719

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01115719

Keywords

Navigation