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Growth of titanium oxide overlayers by thermal oxidation of titanium

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Abstract

This paper describes a theoretical model for the growth of titanium oxide by thermal oxidation of titanium. It is shown that this model can explain the formation of layers of different oxides of titanium and the changes in these layers with variations in the conditions of oxidation. Some experimental X-ray diffraction results which support the model are also given.

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Authors and Affiliations

  1. Department of Electrical Communication Engineering, Indian Institute of Science, 560 012, Bangalore, India

    R. Padma, K. Ramkumar & M. Satyam

Authors
  1. R. Padma
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  2. K. Ramkumar
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  3. M. Satyam
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Padma, R., Ramkumar, K. & Satyam, M. Growth of titanium oxide overlayers by thermal oxidation of titanium. J Mater Sci 23, 1591–1597 (1988). https://doi.org/10.1007/BF01115696

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  • DOI: https://doi.org/10.1007/BF01115696

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