Abstract
Nucleation of precipitates of silicon dioxide is studied theoretically within the framework of the classical theory of nucleation. Elastic stresses, accompanying nucleation, are taken into account under the assumption that the nucleus and matrix are incoherent and the silicon is elastically isotropic. The results of a numerical calculation of the form and dimensions of the critical nucleus, the free energy of its formation, and the rate of nucleation as a function of the annealing temperature in the range 773–1473 K for oxygen concentrations in the starting single crystal of (0.4–1.4)·1018 cm−3 are presented. It is shown that homogeneous nucleation of precipitates is, in principle, possible. The magnitude of the specific free energy of the interphase boundary is estimated based on the data obtained.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 8, pp. 25–29, August, 1988.
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Pekarev, A.I., Panasenkova, M.I., Burmistrov, A.N. et al. Thermodynamics of nucleation in an internal oxide getter in silicon. Soviet Physics Journal 31, 627–631 (1988). https://doi.org/10.1007/BF01102537
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DOI: https://doi.org/10.1007/BF01102537