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Dispersion of the refractive index of pyrolytic films of silicon nitride

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Literature cited

  1. A. S. Belanovskii and G. D. Baranov, “Silicon nitride films,” in: Series: Semiconductors Instruments [in Russian], Vol. 15, TsNII Elektronika, Moscow (1968).

    Google Scholar 

  2. E. A. Taft, J. Electrochem. Soc.,118, 1341 (1971).

    Google Scholar 

  3. H. R. Philipp, J. Electrochem. Soc.,130, 295 (1973).

    Google Scholar 

  4. V. V. Shcheglova and V. I. Myakinenkov, “New dielectric materials in the production of semiconductor instruments and integrated circuits,” in: Series: Semiconductors [in Russian], Vol. 10, TsNII Elektronika, Moscow (1973).

    Google Scholar 

  5. Physics of Thin Films [Russian translation], Vols.1 and 2, Mir, Moscow (1967).

  6. Yu. I. Ukhanov, Semiconductor Optics, Part 1 [in Russian], LPI im. M. I. Kalinin (1970).

  7. T. Moss, Optical Properties of Semiconductors [Russian translation], IL, Moscow (1961).

    Google Scholar 

  8. Constructor's Handbook of Optico-Mechanical Instruments [in Russian], Mashinostroenie, Leningrad (1968).

  9. Yu. N. Volgin, G. P. Dubrovskii, V. P. Kovalev, A. M. Zykov, and Yu. I. Ukhanov, Fiz. Tekh. Poluprov.,4, 2398 (1970).

    Google Scholar 

  10. G. A. Vorob'ev, P. E. Troyan, and Yu. V. Yankelevich, Radiotekh. Élektron.,19, 454 (1974).

    Google Scholar 

  11. H. V. Coleman and D. J. D. Thomas, Phys. Status Solidi,25, 241 (1968).

    Google Scholar 

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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 24, No. 1, pp. 164–166, January, 1976.

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Volgin, Y.N., Borisov, O.P., Ukhanov, Y.I. et al. Dispersion of the refractive index of pyrolytic films of silicon nitride. J Appl Spectrosc 24, 115–117 (1976). https://doi.org/10.1007/BF01100739

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  • DOI: https://doi.org/10.1007/BF01100739

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