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Achieving unity in film-thickness measurements

  • Linear and Angular Measurements
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Measurement Techniques Aims and scope

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Literature cited

  1. V. P. Severdenko and É. I. Tochitskii, Structure of Thin Metallic Films [in Russian], Nauka i Tekhnika, Minsk (1968).

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  2. E. Idczak, Przeglad Elektroniki, No. 7, 9 (1968).

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  3. L. S. Palatnik et al., Zavod. Lab., Nos. 2 and 3 (1968).

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Authors
  1. M. G. Boguslavskii
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  2. R. A. Laaneots
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 6, pp. 16–17, June, 1970.

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Boguslavskii, M.G., Laaneots, R.A. Achieving unity in film-thickness measurements. Meas Tech 13, 827–828 (1970). https://doi.org/10.1007/BF01061540

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  • DOI: https://doi.org/10.1007/BF01061540

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