Skip to main content
SpringerLink
Log in

Plasma-aided manufacturing

  • Published:
Journal of Fusion Energy Aims and scope Submit manuscript

Abstract

Plasma-aided manufacturing is used for producing new materials with unusual and superior properties, for developing new chemical compounds and processes, for machining, and for altering and refining materials and surfaces. Plasma-aided manufacturing has direct applications to semiconductor fabrication, materials synthesis, welding, lighting, polymers, anti-corrosion coatings, machine tools, metallurgy, electrical and electronics devices, hazardous waste removal, high performance ceramics, and many other items in both the high-technology and the more traditional industries in the United States.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. L. Shohet (1987). Plasma science and engineering. InEncyclopedia of Science and Technology (Harcourt Brace Jovanovich, San Diego).

    Google Scholar 

  2. D. M. Manos and D. L. Flamm (1989).Plasma Etching, D. M. Manos (ed.) (Harcourt Brace Jovanovich, San Diego).

    Google Scholar 

  3. Special issue on thermal plasma processing (1989).Plasma Chem. Plasma Proc. 9 (Suppl.).

  4. Plasma Processing, Symposia Proceedings, Vol. 68, J. W. Cobum, R. A. Gottscho, and D. W. Hess (eds.), (Materials Research Society, Pittsburgh, Pennsylvania).

  5. J. W. Coburn (1982).Plasma Chem. Plasma Proc. 2,(1).

  6. H. Kimura (1984).Fine Ceramic Industry in Japan: Current Developments, Vol. 3. LTCB Research Special Issue, Japan's High Technology Industry (Long Term Credit Bank of Japan, Tokyo).

    Google Scholar 

  7. H. Herman (1988).Sci. Am. 259, 112.

    Google Scholar 

  8. H. Yasuda (1985).Plasma Polymerization (Academic, New York).

    Google Scholar 

  9. J. V. R. Heberlein, W. J. Melilli, S. V. Dighe, and W. H. Reed (1989). InProceedings of the International Symposium on Plasma Chemistry, Pugnochiuso, Italy (Universita degli Studi di Bari, Bari, Italy), p. 10.

    Google Scholar 

  10. G. E. P. Box, W. G. Hunter, and J. S. Hunter (1978).Statistics for Experimenters: An Introduction to Design, Data Analysis, and Model Building (Wiley, New York).

    Google Scholar 

  11. L. Ephrath (private communication).

  12. Plasma Processing of Materials (1985). National Materials Advisory Board, National Research Council (National Academy of Sciences, Washington, D. C.).

  13. J. R. Conrad, J. L. Radtke, R. A. Dodd, F. J. Worzala, and N. C. Tran (1987).J. Appl. Phys. 62, 4591.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison, 53706, Madison, Wisconsin

    J. L. Shohet

Authors
  1. J. L. Shohet
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Shohet, J.L. Plasma-aided manufacturing. J Fusion Energ 12, 349–360 (1993). https://doi.org/10.1007/BF01054812

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01054812

Keywords

Search

Navigation