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Influence of diffusion of the electron energy distribution function in a low-temperature microwave discharge plasma

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Radiophysics and Quantum Electronics Aims and scope

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Literature Cited

  1. I. Shkarovskii, T. Johnston, and M. Bochinskii, Kinetics of Plasma Particles [in Russian], Atomizdat, Moscow (1969).

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  2. S. Yoshida, A. V. Phelps, and L. C. Pitchford, Phys. Rev.,27A, No. 6, 2858 (1983).

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  3. N. A. Dyatko, I. V. Kochetov, A. P. Napartovich, and M. D. Taran, Preprint of the Institute of Atomic Energy No. 3842/12, Moscow (1983).

  4. V. Yu. Baranov, V. M. Borisov, F. I. Vysikailo, et al., Preprint of the Institute of Atomic Energy No. 3080, Moscow (1979).

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Authors
  1. N. A. Dyatko
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  2. I. V. Kochetov
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  3. A. P. Napartovich
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Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Radiofizika, Vol. 32, No. 2, pp. 235–241, February, 1989.

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Dyatko, N.A., Kochetov, I.V. & Napartovich, A.P. Influence of diffusion of the electron energy distribution function in a low-temperature microwave discharge plasma. Radiophys Quantum Electron 32, 184–189 (1989). https://doi.org/10.1007/BF01039676

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  • DOI: https://doi.org/10.1007/BF01039676

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