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Silicon nitride optical waveguides on silicon substrates

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Authors
  1. I. I. Itkin
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  2. A. G. Morozov
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  3. S. M. Shandarov
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Additional information

Tomsk Institute of Automated Control Systems and Radio Electronics. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Radiofizika, Vol. 31, No. 4 pp. 473–479, April, 1988.

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Itkin, I.I., Morozov, A.G. & Shandarov, S.M. Silicon nitride optical waveguides on silicon substrates. Radiophys Quantum Electron 31, 354–359 (1988). https://doi.org/10.1007/BF01034460

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  • DOI: https://doi.org/10.1007/BF01034460

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