Analysis of near-electrode plasma perturbation region
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The problem of parameter distribution in the plasma perturbation region near an electrode surface is considered on the basis of the diffusion equations.
Depending on the parameter values, in the solution there may exist two regions: laminar diffusion and a space charge layer.
Approximate solutions are obtained for these regions in the form of the principal term of the expansion in terms of the parameter υ==(h/li)2, where h is the Debye length andli is the dimension of the perturbation region. Under certain conditions these solutions may be obtained in closed form. The conditions for matching the solutions at the boundary of these regions are discussed.
If the parameters defining the problem are such that h≪λm orli≪m, where λm is the mean free path, then the plasma is separated from the electrode by a dielectric layer of free-molecular particle motion. The presence of this layer must be taken into account in formulating the boundary conditions for the continuum equations.
The results are used to determine the possible parameter variation in the perturbation region for specific gas mixtures and different values of the defining parameters.
KeywordsApproximate Solution Electrode Surface Closed Form Parameter Variation Free Path
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