Semiconductor nondestructive testing by helicon waves
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It is shown that the locally excited helicon waves propagate in a semiconductor in terms of a narrow beam. This helicon peculiarity is proposed to be used for the local and contactless measurement of the free charge carrier concentration and mobility as well as the inhomogeneity of their distribution in the material volume. The operating principle of the first helicon tester of the semiconductor electrical homogeneity is presented.
Key wordssemiconductors diagnostics helicons
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