Tensor permittivity measurements of thin films at millimeter wavelengths
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Although thin dielectric films are finding more applications in microwave and millimeter-wave circuits, measurement of their dielectric properties presents some unique problems, especially if the films are anisotropic and properly characterized by a permitivity tensor. We have developed a folded open-cavity resonator to aid in the determination of the three tensor permittivity matrix elements of anisotropic thin films with thicknesses in the range 25–100 μm. A description of the method is followed by data on stretched polyethylene terephthalate at 35 GHz.
KeywordsThin Film Microwave Polyethylene Matrix Element Dielectric Property
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