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Tensor permittivity measurements of thin films at millimeter wavelengths

  • Jing-Fu Zhao
  • Karl D. Stephan
  • Sai-Chu Wong
  • Roger S. Porter
Article

Abstract

Although thin dielectric films are finding more applications in microwave and millimeter-wave circuits, measurement of their dielectric properties presents some unique problems, especially if the films are anisotropic and properly characterized by a permitivity tensor. We have developed a folded open-cavity resonator to aid in the determination of the three tensor permittivity matrix elements of anisotropic thin films with thicknesses in the range 25–100 μm. A description of the method is followed by data on stretched polyethylene terephthalate at 35 GHz.

Keywords

Thin Film Microwave Polyethylene Matrix Element Dielectric Property 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Publishing Corporation 1988

Authors and Affiliations

  • Jing-Fu Zhao
    • 1
  • Karl D. Stephan
    • 1
  • Sai-Chu Wong
    • 1
  • Roger S. Porter
    • 2
  1. 1.Dept. of Electrical & Computer EnineeringUniversity of MassachusetttsAmherst
  2. 2.Dept. of Polymer Science & EngineeringUniversity of MassachusettsAmherst

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