Tensor permittivity measurements of thin films at millimeter wavelengths

  • Jing-Fu Zhao
  • Karl D. Stephan
  • Sai-Chu Wong
  • Roger S. Porter


Although thin dielectric films are finding more applications in microwave and millimeter-wave circuits, measurement of their dielectric properties presents some unique problems, especially if the films are anisotropic and properly characterized by a permitivity tensor. We have developed a folded open-cavity resonator to aid in the determination of the three tensor permittivity matrix elements of anisotropic thin films with thicknesses in the range 25–100 μm. A description of the method is followed by data on stretched polyethylene terephthalate at 35 GHz.


Thin Film Microwave Polyethylene Matrix Element Dielectric Property 
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Copyright information

© Plenum Publishing Corporation 1988

Authors and Affiliations

  • Jing-Fu Zhao
    • 1
  • Karl D. Stephan
    • 1
  • Sai-Chu Wong
    • 1
  • Roger S. Porter
    • 2
  1. 1.Dept. of Electrical & Computer EnineeringUniversity of MassachusetttsAmherst
  2. 2.Dept. of Polymer Science & EngineeringUniversity of MassachusettsAmherst

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