Conclusions
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1.
A master instrument has been developed, investigated, and certified for reproducing the unit of pressure in total and partial absolute pressure range of 10−3–10−11 Pa (total pressure) and 10−3–10−6 Pa (partial pressure).
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2.
The apparatus consists of the following master devices; the GRAD cryogenic master device of second class; OIM master ionization pressure gauge of third class; the OGIP master device of third class for calibrating partial pressure gauges; and the ORU-2 master pressure reduction device of the second class.
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3.
The characteristics of the instruments are given in Table 4.
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4.
The limiting pressure obtained with the GRAD cryostatic device is (3–4)·10−11 Pa; it is the lowest pressure ever obtained in a device of this type.
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Translated from Izmeritel'naya Tekhnika, No. 11, pp. 29–33, November, 1971.
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Gulyaev, M.A., Eryukhin, A.V. Development of master instruments for measuring total and partial pressures in high and ultrahigh vacuum regions. Meas Tech 14, 1662–1669 (1971). https://doi.org/10.1007/BF00997855
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DOI: https://doi.org/10.1007/BF00997855