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8–15 μm thick silicon resistance strain gages with small creep for measuring strains and stresses

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Translated from Izmeritel'naya Tekhnika, No. 9, p. 70, September, 1993.

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Sin'kov, Y.P., Godzikovskii, V.A. 8–15 μm thick silicon resistance strain gages with small creep for measuring strains and stresses. Meas Tech 36, 1064 (1993). https://doi.org/10.1007/BF00995805

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  • DOI: https://doi.org/10.1007/BF00995805

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