Conclusions
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1.
Three independent methods have been developed for experimental measurement of the conductance of small apertures; the methods permit one to obtain the conductance directly on a calibrated apparatus.
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2.
The methods are based on the theoretical calculation of the conductances of larger apertures of the correct shape, reproduction of the unit of pressure by a compression gauge, and use of ionization gauges to establish certain pressures.
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3.
The use of all three methods to determine conductances of the order of 10−7–10−8 m3/sec permits one to obtain a conductance value with an error of 1.5–2%.
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Literature cited
A. V. Eryukhin and V. V. Kuz'min, Izmeritel. Tekh., No. 4 (1969).
P. Clausing, Ann. Phys., No. 8 (1932).
W. C. De Markus and E. H. Hopper, J. Chem. Phys.,23 (1955).
E. H. Kennard, Kinetic Theory of Gases with an Introduction to Statistical Mechanics, McGraw-Hill, New York (1938).
B. B. Dayton, Vacuum,15 (1965).
J. C. Helmer, J. Vac. Sci. Technol., No. 4 (1967).
A. S. Berman, J. Appl. Phys., No. 10 (1965).
A. J. Bureau, L. J. Laslett, and J. M. Keller, Rev. Sci. Instrum., No. 12 (1952).
W. D. Davis, Trans. 10th AVS Vacuum Symposium (1963).
Additional information
Translated from Izmeritel'naya Tekhnika, No. 6, pp. 26–29, June, 1969.
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Eryukhin, A.V., Kuz'min, V.V. Conductance of small apertures. Meas Tech 12, 793–798 (1969). https://doi.org/10.1007/BF00995080
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DOI: https://doi.org/10.1007/BF00995080