Literature cited
H. Schwarz, in: Modern Vacuum Technology [Russian translation], IIL, Moscow (1963).
Holland, Film Microelectronics [Russian translation], Mir, Moscow (1968).
Additional information
Translated from Izmeritel'naya Tekhnika, No. 7, pp. 63–65, July, 1970.
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Vasil'kovskii, A.A., Gol'fenshtein, P.N. Evaluating the ionic saturation potential in thermal spraying of thin films in vacuum. Meas Tech 13, 1064–1067 (1970). https://doi.org/10.1007/BF00994566
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DOI: https://doi.org/10.1007/BF00994566