Abstract
A method is proposed for calibrating SEM with checks on the initial data at the start of calibration. A criterion is formulated for detecting focussing errors during SEM measurements.
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Translated from Izmeritel'naya Tekhnika, No. 6, pp. 60–61, June, 1995.
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Novikov, Y.A., Rakov, A.V. & Stekolin, I.Y. Scanning electron microscope calibration with input data checking. Meas Tech 38, 697–700 (1995). https://doi.org/10.1007/BF00991123
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DOI: https://doi.org/10.1007/BF00991123