Abstract
The use of near-zone diffraction for dimensional control of holes with a size in the millimeter range in thin diaphragms is considered. The paper gives the main analytical expressions found for describing the relation between the radius of the hole being inspected and the diffraction pattern parameters. The dominant errors that arise in this method are analyzed.
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Additional information
Translated from Izmeritel'naya Tekhnika, No. 6, pp. 20–23, June, 1995.
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Il'in, V.N. Application of fresnel diffraction for dimensional control of holes. Meas Tech 38, 627–633 (1995). https://doi.org/10.1007/BF00991109
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DOI: https://doi.org/10.1007/BF00991109