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Interference method of measuring the thickness of thin transparent films

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Measurement Techniques Aims and scope

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  1. V. F. Shvets, Author's Certificate in Bulletin of Inventions, 1962, No. 6.

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Shvets, V.F. Interference method of measuring the thickness of thin transparent films. Meas Tech 5, 538–540 (1962). https://doi.org/10.1007/BF00989014

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  • DOI: https://doi.org/10.1007/BF00989014

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