Abstract
A computer-based measurement system has been designed and built for noncontact nondestructive measurement of charge and potential distribution on dielectric and semiconductor layers and films for various purposes.
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Translated from Izmeritel'naya Tekhnika, No. 8, pp. 49–51, August, 1993.
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Grishchenko, V.L., Matveeva, I.A. & Sotov, L.S. Instrumentation for quality control and flaw detection of machine parts and materials by electrostatic induction. Meas Tech 36, 924–927 (1993). https://doi.org/10.1007/BF00983994
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DOI: https://doi.org/10.1007/BF00983994