Journal of Materials Science

, Volume 19, Issue 12, pp 3895–3907 | Cite as

Inherent ductility in amorphous Ta2O5 films

  • Hani Rizkalla
  • Stephen T. Wellinghoff


Thin films (30 to 80 nm) of refractory tantalum metal were successfully sputter-deposited on uniformly deformable fluoropolymer and polyimide substrates in stress free form. These films were later anodized into amorphous Ta2O5 which is a non-porous (barriertype) oxide with excellent corrosion resistant properties. X-ray photo-emission spectroscopy studies were carried out on tantalum and Ta2O5 to determine the chemical composition and oxidation states of elements. Thin tantalum and Ta2O5 films on fluoropolymer substrates contained fluorine as an impurity while similar films on polyimide substrate contained no fluorine and, in general, fewer impurities. Both thin tantalum films and the corresponding anodic oxides, when deformed in tension to 10% strain, exhibited the expected ductile behaviour of metals where slip bands were observed in the electron microscope. In some cases, minor cracks were observed in the deformed anodic films due to suspected local detachment of the film from the substrate.


Fluorine Tantalum Slip Band Anodic Film Corrosion Resistant Property 
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Copyright information

© Chapman and Hall Ltd. 1984

Authors and Affiliations

  • Hani Rizkalla
    • 1
  • Stephen T. Wellinghoff
    • 1
  1. 1.Department of Chemical Engineering and Materials ScienceUniversity of MinnesotaMinneapolisUSA

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