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Dynamic aspects of precision linear-displacement measurement

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Abstract

A qualitative analysis is presented for dynamic linear-displacement measurement. When measurements are made with errors in the submicron and nanometer ranges, it may be necessary to correct for dynamic errors whose origin is geometrical.

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Authors
  1. L. Z. Dich
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 9, pp. 23–25, September, 1994.

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Dich, L.Z. Dynamic aspects of precision linear-displacement measurement. Meas Tech 37, 1011–1014 (1994). https://doi.org/10.1007/BF00980127

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  • DOI: https://doi.org/10.1007/BF00980127

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