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Vacuum membrane capacity meters with electrostatic compensation

  • General Aspects of Metrology and Measurement Techniques
  • Published:
Measurement Techniques Aims and scope

Abstract

We describe new features of vacuum membrane capacity meters with electrostatic compensation, which improves their performance and expands their functional applicability for measuring volumes with complex configurations and flow rates of small gas streams. The concept is based on introduction of an additional reservoir with mobile gas-impermeable gate. When connected to the chambers of pressure gauge converter, the unit reduces the chamber volume in the course of pressure measurement so as to modify the conversion ratio in the vacuum meter measurement equation.

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References

  1. E. S. Frolov and V. E. Minaichev (eds.), Vacuum Technology: A Handbook [in Russian], Mashinostroenie, Moscow (1985).

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Authors
  1. V. V. Suprunyuk
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  2. V. G. Kazakov
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 6, pp. 9–10, June, 1993.

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Suprunyuk, V.V., Kazakov, V.G. Vacuum membrane capacity meters with electrostatic compensation. Meas Tech 36, 622–623 (1993). https://doi.org/10.1007/BF00980000

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  • DOI: https://doi.org/10.1007/BF00980000

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