Measurement Techniques

, Volume 34, Issue 11, pp 1122–1124 | Cite as

Coating thickness testing by the Rutherford scattering method

  • S. M. Solov'ev
Linear and Angular Measurements
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Keywords

Physical Chemistry Analytical Chemistry Coating Thickness Scattering Method Thickness Testing 

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Literature cited

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    W. K. Chu, J. W. Mayer, and M. A. Nicolet, Backscattering Spectrometry, Academic Press, New York (1978).Google Scholar
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    T. E. Ekonomen, A. L. Turkwich, W. A. Anderson, and E. M. Blue, Science,181, 156 (1973).Google Scholar
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    E. Rutherford, Philos. Mag.,21, 669 (1911).Google Scholar
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    O. F. Nemets and Yu. V. Gofman, Handbook on Nuclear Physics [in Russian], Naukova Dumka, Kiev (1975).Google Scholar
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    A. S. Voronin, V. Ya. Mishin, S. M. Solov'ev, et al., Radiokhimiya,37, No. 3, 354 (1985).Google Scholar

Copyright information

© Plenum Publishing Corporation 1992

Authors and Affiliations

  • S. M. Solov'ev

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