Abstract
A method of calibrating scanning electron microscopes by means of rectangularly shaped pitch structures is proposed. By means of these types of pitch structures it is possible to determine the increase in the microscope image, the shift in the maximum video signal relative to the coordinates of the wall of the structure, and the diameter of the electron microprobe. Information about these quantities yields a tenfold increase in the measurement precision obtained for the linear dimensions of submicron elements when using a scanning electron microscope.
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Additional information
Translated from Izmeritel'naya Tekhnika, No. 2, pp. 64–66, February, 1995.
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Novikov, Y.A., Rakov, A.V. & Stekolin, I.Y. Calibration of scanning electron microscopes by means of pitch structures. Meas Tech 38, 242–245 (1995). https://doi.org/10.1007/BF00979646
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DOI: https://doi.org/10.1007/BF00979646