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Measurement Techniques

, Volume 38, Issue 2, pp 242–245 | Cite as

Calibration of scanning electron microscopes by means of pitch structures

  • Yu. A. Novikov
  • A. V. Rakov
  • I. Yu. Stekolin
Calibration of Measurement Instruments
  • 15 Downloads

Abstract

A method of calibrating scanning electron microscopes by means of rectangularly shaped pitch structures is proposed. By means of these types of pitch structures it is possible to determine the increase in the microscope image, the shift in the maximum video signal relative to the coordinates of the wall of the structure, and the diameter of the electron microprobe. Information about these quantities yields a tenfold increase in the measurement precision obtained for the linear dimensions of submicron elements when using a scanning electron microscope.

Keywords

Electron Microscope Scanning Electron Microscope Physical Chemistry Analytical Chemistry Microscope Image 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Publishing Corporation 1995

Authors and Affiliations

  • Yu. A. Novikov
  • A. V. Rakov
  • I. Yu. Stekolin

There are no affiliations available

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