Literature cited
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Additional information
Translated from Izmeritel'naya Tekhnika, No. 1, pp. 17–18, January, 1991.
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Grigor'ev, V.K., Petrovskii, V.I. & Shchapova, I.A. A matrix method in ellipsometric multilayer structure monitoring. Meas Tech 34, 27–29 (1991). https://doi.org/10.1007/BF00978286
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DOI: https://doi.org/10.1007/BF00978286