Determination of the diameter of the electron probe of a scanning electron microscope
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A technique is proposed for determining the diameter of electron probes used in modern scanning electron microscopes within 1-nm error limits by means of a linear gauge. The gauge is designed for the calibration of such microprobes and represents a relief structure in the form of slotted grooves in silicon with a nearly rectangular profile.
KeywordsSilicon Electron Microscope Scanning Electron Microscope Physical Chemistry Analytical Chemistry
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