Determination of the diameter of the electron probe of a scanning electron microscope
- 18 Downloads
A technique is proposed for determining the diameter of electron probes used in modern scanning electron microscopes within 1-nm error limits by means of a linear gauge. The gauge is designed for the calibration of such microprobes and represents a relief structure in the form of slotted grooves in silicon with a nearly rectangular profile.
KeywordsSilicon Electron Microscope Scanning Electron Microscope Physical Chemistry Analytical Chemistry
Unable to display preview. Download preview PDF.
- 1.J. I. Goldstein and H. Yakowitz (eds.), Practical Scanning Electron Microscopy, Plenum Press, New York (1975).Google Scholar
- 2.J. I. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis: A Text for Biologists, Materials Scientists, and Geologists, 2nd ed., Plenum Press, New York (1992).Google Scholar
- 3.Yu. A. Novikov et al., Poverkhnost, No. 5, 49 (1993).Google Scholar
- 4.Yu. A. Novikov et al., Izmer. Tekh., No. 8, 62 (1993).Google Scholar