Measurement Techniques

, Volume 36, Issue 12, pp 1348–1350 | Cite as

Determination of the diameter of the electron probe of a scanning electron microscope

  • Yu. A. Novikov
  • A. V. Rakov
  • I. Yu. Stekolin
  • I. B. Strizhkov
Linear and Angular Measurements


A technique is proposed for determining the diameter of electron probes used in modern scanning electron microscopes within 1-nm error limits by means of a linear gauge. The gauge is designed for the calibration of such microprobes and represents a relief structure in the form of slotted grooves in silicon with a nearly rectangular profile.


Silicon Electron Microscope Scanning Electron Microscope Physical Chemistry Analytical Chemistry 
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    J. I. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis: A Text for Biologists, Materials Scientists, and Geologists, 2nd ed., Plenum Press, New York (1992).Google Scholar
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    Yu. A. Novikov et al., Poverkhnost, No. 5, 49 (1993).Google Scholar
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    Yu. A. Novikov et al., Izmer. Tekh., No. 8, 62 (1993).Google Scholar

Copyright information

© Plenum Publishing Corporation 1994

Authors and Affiliations

  • Yu. A. Novikov
  • A. V. Rakov
  • I. Yu. Stekolin
  • I. B. Strizhkov

There are no affiliations available

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