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Translated from Izmeritel'naya Tekhnika, No. 1, pp. 45–47, January, 1992.
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Kazaryan, A.A. A multilayer thin film capacitive pressure transducer. Meas Tech 35, 79–82 (1992). https://doi.org/10.1007/BF00977885
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DOI: https://doi.org/10.1007/BF00977885