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A multilayer thin film capacitive pressure transducer

  • Mechanical Measurements
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Measurement Techniques Aims and scope

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Literature cited

  1. A. A. Kazaryan et al., Izmer. Tekh., No. 10, 29 (1990).

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  2. M. Portat and M. Chatanier, A. Recherche Aerospatial, No. 3, 177 (1982).

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  3. A. A. Kazaryan, Summary of Reports at the Ninth Conference on Aircraft Acoustics [in Russian], Moscow (1989), p. 440.

  4. M. I. Bessonov, M. M. Koton, et al., Polyimides — A Class of Thermostable Polymers [in Russian], Nauka, Moscow (1983).

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  5. N. N. Pisarevskii and V. G. Karadzhi, Inventor's Certificate No. 1,182,296 (USSR), Otkryt. Izobret. No. 36 (1985).

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Translated from Izmeritel'naya Tekhnika, No. 1, pp. 45–47, January, 1992.

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Kazaryan, A.A. A multilayer thin film capacitive pressure transducer. Meas Tech 35, 79–82 (1992). https://doi.org/10.1007/BF00977885

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  • DOI: https://doi.org/10.1007/BF00977885

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