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Interference setup for certification of thickness gauges for coatings in the nanometer range

  • Linear and Angular Measurements
  • Published:
Measurement Techniques Aims and scope

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Literature cited

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Authors
  1. M. A. Kos'mina
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Translated from Izmeritel'naya Tekhnika, No. 5, pp. 13–14, May, 1992.

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Kos'mina, M.A. Interference setup for certification of thickness gauges for coatings in the nanometer range. Meas Tech 35, 542–545 (1992). https://doi.org/10.1007/BF00977577

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  • DOI: https://doi.org/10.1007/BF00977577

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