Measurement Techniques

, Volume 35, Issue 9, pp 1031–1035 | Cite as

Evaluation of transmission functions of slit apertures in testing by shadow and split images

  • V. K. Aleksandrov
  • A. L. Starkov
Opticophysical Measurements
  • 9 Downloads

Keywords

Physical Chemistry Analytical Chemistry Transmission Function Split Image Slit Aperture 

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Literature cited

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    L. N. Vorontsov, Photoelectric Systems for Control of Linear Variables [in Russian], Mashinostroenie, Moscow (1965).Google Scholar
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    V. K. Aleksandrov and V. N. Il'in, Metric Foundations of the Image Splitting Method for Measurement of Errors of Periodic Structures [in Russian], Manuscript deposited with VINITI, No. 4120-79, Minsk (1980).Google Scholar
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    J. Dyson, J. Opt. Soc. Am.,50, No. 8, 754 (1960).Google Scholar
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    V. K. Aleksandrov and V. N. Il'in, Metrologiya, No. 4, (1985), p. 38.Google Scholar
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    V. K. Aleksandrov, Yu. N. Bienko, and V. N. Il'in, Optoelectronic Size Testing Devices for Microscopic Industrial Objects [in Russian], Nauka i Tekhnika, Minsk (1988).Google Scholar
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    V. K. Aleksandrov and V. N. Loshak, PTE, No. 6, 175 (1979).Google Scholar

Copyright information

© Plenum Publishing Corporation 1993

Authors and Affiliations

  • V. K. Aleksandrov
  • A. L. Starkov

There are no affiliations available

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