Abstract
An analysis is made of methods of measuring the size (diameter) of the electron probe of a scanning electron microscope. Methods involving the cutoff of a specified signal level and the use of an effective rectangular beam are examined.
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Additional information
Translated from Izmeritel'naya Tekhnika, No. 1, pp. 28–29, January, 1995.
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Novikov, Y.A., Rakov, A.V. & Stekolin, I.Y. Measuring the diameter of an electron probe with a scanning electron microscope. Meas Tech 38, 46–49 (1995). https://doi.org/10.1007/BF00976746
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DOI: https://doi.org/10.1007/BF00976746