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Integrated semiconductor hydrogen sensors

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Measurement Techniques Aims and scope

Abstract

The results are presented of an experimental investigation of the temporal drift and the hydrogen response of five types of integrated semiconductor sensors with palladium films, and a refined model is proposed for the hydrogen sensitivity of sensors with a palladium-insulator-semiconductor structure.

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Authors
  1. S. V. Fomenko
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  2. B. I. Podlepetskii
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  3. S. V. Gumenyuk
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 1, pp. 22–25, January, 1995.

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Fomenko, S.V., Podlepetskii, B.I. & Gumenyuk, S.V. Integrated semiconductor hydrogen sensors. Meas Tech 38, 36–41 (1995). https://doi.org/10.1007/BF00976744

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  • DOI: https://doi.org/10.1007/BF00976744

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