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Precision integrated pressure transducers

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Measurement Techniques Aims and scope

Abstract

The technology of manufacturing precision silicon integrated pressure transducers by the methods of traditional planar large-scale integration technology is considered. By employing an advanced construction and technology of the sensitive element and a temperature compensation circuit, a high acceptance ratio yield and good metrological characteristics are obtained.

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References

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Authors
  1. V. N. Zimin
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  2. N. Z. Salakhov
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  3. Yu. A. Chaplygin
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  4. D. V. Shabratov
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  5. N. A. Shelepin
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 1, pp. 20–21, January, 1995.

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Zimin, V.N., Salakhov, N.Z., Chaplygin, Y.A. et al. Precision integrated pressure transducers. Meas Tech 38, 33–35 (1995). https://doi.org/10.1007/BF00976743

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  • DOI: https://doi.org/10.1007/BF00976743

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