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Errors in the photometric determination of the standard deviation of a surface profile

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Measurement Techniques Aims and scope

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Abstract

A comparative analysis is presented of the precision parameters of different variants of the photometric method of measuring the standard deviation from surface profiles R q.A variant by means of which the maximal precision of measuring R q over a broad range of values is determined.

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References

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Authors
  1. N. I. Aleshkevich
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  2. Yu. N. Sviridenko
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  3. V. V. Syt'ko
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 4, pp. 37–39, April, 1995.

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Aleshkevich, N.I., Sviridenko, Y.N. & Syt'ko, V.V. Errors in the photometric determination of the standard deviation of a surface profile. Meas Tech 38, 426–429 (1995). https://doi.org/10.1007/BF00976438

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  • DOI: https://doi.org/10.1007/BF00976438

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