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Influence of phase perturbations on laser diffractometry of micro-orifices

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Translated from Izmeritel'naya Tekhnika, No. 8, pp. 23–25, August, 1990.

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Kiiko, V.V., Tarlykov, V.A. & Chizhov, S.A. Influence of phase perturbations on laser diffractometry of micro-orifices. Meas Tech 33, 772–776 (1990). https://doi.org/10.1007/BF00976151

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  • DOI: https://doi.org/10.1007/BF00976151

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