Abstract
A method is proposed for calibrating a scanning electron microscope that enables one to use a linear measure with a single certified dimension to determine all the basic parameters needed for making linear measurements: image magnification, electron-probe diameter, and correction parameter for deriving the true dimensions of relief elements from the distance between video-signal maxima.
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Additional information
Translated from Izmeritel'naya Tekhnika, No. 7, pp. 68–70, July, 1994.
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Novikov, Y.A., Rakov, A.V. & Stekolin, I.Y. Calibrating a scanning electron microscope by means of a linear measure having one certified dimension. Meas Tech 37, 841–844 (1994). https://doi.org/10.1007/BF00975812
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DOI: https://doi.org/10.1007/BF00975812