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Measurement of a dielectric film thickness in the course of spraying

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Measurement Techniques Aims and scope

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Literature cited

  1. X. Meir, W. Schroen, and D. Stunkel, in a collection entitled Modern Vacuum Technology [Russian translation], IL, Moscow (1963)

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  2. K. Berndt and R. Louw, in a collection entitled Modern Vacuum Technology [Russian translation], IL, Moscow (1963).

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  3. Yu. N. Bodlevskii and N. M. Sharunenko, “Physical methods for measuring the thickness of thin films”. Advanced Scientific, Technical and Production Practice. GOSINTI (State Scientific Research Institute of Scientific and Technical Information),Theme 14, No. 2 (1962).

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  5. Scopple Keister, Trans. 9th Nat Vacuum Sympos. Amer. Vacuum Soc., Los Angeles (1962).

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Authors
  1. Yu. G. Yagola
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  2. V. E. Minaichev
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Yagola, Y.G., Minaichev, V.E. Measurement of a dielectric film thickness in the course of spraying. Meas Tech 9, 655–657 (1966). https://doi.org/10.1007/BF00975222

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  • DOI: https://doi.org/10.1007/BF00975222

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