Abstract
We discuss the fabrication process and characteristics of three consecutive runs of double-fused 1.5-μm vertical-cavity lasers. We have measured light-current characteristics of over three hundred lasers with ten different diameters between 6 and 60 μm and observe a yield of over 95%. The process and design improvements resulted in a low pulsed threshold current of 3 mA on a number of 6- and 8-μm-diameter devices and threshold current density of 2 kA cm−2 on 60-μm-diameter devices at room temperature.
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Babić, D.I., Streubel, K., Mirin, R.P. et al. Fabrication and characteristics of double-fused vertical-cavity lasers. Opt Quant Electron 28, 475–485 (1996). https://doi.org/10.1007/BF00943615
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DOI: https://doi.org/10.1007/BF00943615