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Soviet Physics Journal

, Volume 34, Issue 1, pp 35–39 | Cite as

Influence of vacuum annealing on the asymmetry of the electrical conductivity of tantalum pentoxide films

  • B. T. Boiko
  • V. R. Kopach
  • N. G. Krushedol'skaya
  • P. A. Panchekha
  • Yu. L. Pozdeev
  • V. V. Starikov
Physics of Semiconductors and Dielectrics
  • 22 Downloads

Abstract

In this work we demonstrate the influence of interphase interaction processes, taking place at the layer boundaries during vacuum annealing of Ta-Ta2O5 sandwiches, on the asymmetry of the electrical conductivity of Ta2O5 films. These processes are demonstrated to be local in nature.

Keywords

Layer Boundary Electrical Conductivity Tantalum Interaction Process Pentoxide 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Publishing Corporation 1991

Authors and Affiliations

  • B. T. Boiko
    • 1
  • V. R. Kopach
    • 1
  • N. G. Krushedol'skaya
    • 1
  • P. A. Panchekha
    • 1
  • Yu. L. Pozdeev
    • 1
  • V. V. Starikov
    • 1
  1. 1.V. I. Lenin Polytechnical InstituteKhar'kov

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