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Translated from Zhurnal Prikladnoi Mekhaniki i Tekhnicheskoi Fiziki, No. 2, pp. 40–45, March–April, 1985.
The authors thank A. B. Gulakov for assistance in performing the work.
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Klimkin, V.F., Lomakin, G.S. Spatial resolution and accuracy of interferometery of microscopic phase objects. J Appl Mech Tech Phys 26, 187–191 (1985). https://doi.org/10.1007/BF00908963
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DOI: https://doi.org/10.1007/BF00908963