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Packing defects in silicon films grown using molecular beams in vacuum

  • Physics of Semiconductors and Dielectrics
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Translated from Izvestiya-Vysshikh Uchebnykh Zavedenii, Fizika, No. 7, pp. 3–6, July, 1983.

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Kuznetsov, V.P., Rubtsova, R.A., Isaeva, T.M. et al. Packing defects in silicon films grown using molecular beams in vacuum. Soviet Physics Journal 26, 579–581 (1983). https://doi.org/10.1007/BF00897623

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  • DOI: https://doi.org/10.1007/BF00897623

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