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Ionic processes in dielectric layers on silicon surface and their effect on electrophysical properties of silicon-dielectric boundary

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Literature cited

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 9, pp. 46–50, September, 1977.

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Tarantov, Y.A., Kas'yanenko, E.V., Konorov, P.P. et al. Ionic processes in dielectric layers on silicon surface and their effect on electrophysical properties of silicon-dielectric boundary. Soviet Physics Journal 20, 1156–1159 (1977). https://doi.org/10.1007/BF00897119

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  • DOI: https://doi.org/10.1007/BF00897119

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