Abstract
The influence of finite diffusion layer width on its piezoresistance coefficient is analyzed in this paper. It is shown that a diminution in the width results in growth of the absolute value and temperature dependence of the fundamental piezoresistance coefficients.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 9, pp. 42–46, September, 1977.
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Gridchin, V.A. On an estimate of the piezoresistance coefficients in diffusion layers taking account of a two-dimensional impurity distribution. Soviet Physics Journal 20, 1153–1155 (1977). https://doi.org/10.1007/BF00897118
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DOI: https://doi.org/10.1007/BF00897118