Applied physics

, Volume 15, Issue 1, pp 115–117 | Cite as

Problems in elemental imaging with an ion microprobe mass analyser

  • J. H. Schilling
  • P. A. Büger
Letter Papers

Abstract

Imaging of surfaces which are in part non-conductive with an ion microprobe mass analyser can result in incorrect patterns of elemental distributions for those elements which sputter as both positive and negative ions. The recorded intensities of sputtered ions are shown to depend on the polarity of the incident and of the emergent ions.

PACS

68.20 79 

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References

  1. 1.
    H.Liebl: NBS (U.S.) Special Publ.427, 1 (1975)Google Scholar
  2. 2.
    R.K.Lewis: NBS (U.S.) Special Publ.400-23, 45 (1976)Google Scholar
  3. 3.
    H.W.Werner: Acta Elect.19, 53 (1976)Google Scholar

Copyright information

© Springer-Verlag 1978

Authors and Affiliations

  • J. H. Schilling
    • 1
  • P. A. Büger
    • 1
  1. 1.National Physical Research LaboratoryC.S.I.R.PretoriaSouth Africa

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