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Impurity trapping during gas-phase epitaxy on gallium arsenide

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Authors and Affiliations

  1. Kuznetsov Siberian Technical Physics Institute, Tomsk University, USSR

    L. G. Lavrent'eva

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 31–44, October, 1983.

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Lavrent'eva, L.G. Impurity trapping during gas-phase epitaxy on gallium arsenide. Soviet Physics Journal 26, 899–909 (1983). https://doi.org/10.1007/BF00896644

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