Epitaxial growth of ferroelectric PLZT thin film and their optical properties
A series of experiments for growing epitaxial PLZT thin films has been made with rf sputtering. X-ray and electron diffraction analyses confirm that the fabricated films grow epitaxially on SrTiO3 and MgO crystals. A good transparency in the region above 0.4 μm to infrared with good ferroelectric properties is obtained. Propagation loss of He−Ne laser light is less than 6 dB/cm, and the PLZT thin film is a promising candidate for the optical modulator and other functional elements for integrated optics.
PACS42.80 78.20 85.60
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- 3.Y.Matsui, Y.Higuma, M.Okuyama, T.Nakagawa, Y.Hamakawa: Proc. 1st Meeting of Ferroelectric Materials and Their Applications (FMA Office, Kyoto 1978) p. 37Google Scholar
- 4.Y.Hamakawa, Y.Matsui, Y.Higuma, T.Nakagawa: Tech. Digest IEEE IEDM, Washington DC (1977) p. 297Google Scholar
- 5.W.E.Perry, B.M.Soltoff: Ferroelectrics10, 201–205 (1976)Google Scholar
- 8.A.Kumada, K.Suzuki, G.Toda: Ferroelectrics10, 25–28 (1976)Google Scholar