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Applied physics

, Volume 21, Issue 4, pp 339–343 | Cite as

Epitaxial growth of ferroelectric PLZT thin film and their optical properties

  • M. Okuyama
  • T. Usuki
  • Y. Hamakawa
  • T. Nakagawa
Contributed Papers

Abstract

A series of experiments for growing epitaxial PLZT thin films has been made with rf sputtering. X-ray and electron diffraction analyses confirm that the fabricated films grow epitaxially on SrTiO3 and MgO crystals. A good transparency in the region above 0.4 μm to infrared with good ferroelectric properties is obtained. Propagation loss of He−Ne laser light is less than 6 dB/cm, and the PLZT thin film is a promising candidate for the optical modulator and other functional elements for integrated optics.

PACS

42.80 78.20 85.60 

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Copyright information

© Springer-Verlag 1980

Authors and Affiliations

  • M. Okuyama
    • 1
  • T. Usuki
    • 1
  • Y. Hamakawa
    • 1
  • T. Nakagawa
    • 2
  1. 1.Faculty of Engineering ScienceOsaka UniversityToyonaka, OsakaJapan
  2. 2.Faculty of EngineeringSetsunan UniversityNeyagawa, OsakaJapan

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