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Experimental investigation of the energy distribution of sputtered excited target atoms bombarded by medium-energy ions

  • Plasma Physics
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Soviet Physics Journal Aims and scope

Abstract

In this paper we experimentally investigate the parameter dependence of a model energy distribution of excited potassium atoms, knocked out by bombarding a KCl monocrystal with normally incident Ar+ ions, on the ion energy and the partial oxygen pressure in the chamber. On the basis of the obtained results a model of the energy distribution is proposed that corresponds to the kinetic formation mechanism for the excited atoms during the sputtering of the target.

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Authors and Affiliations

  1. Donetsk State University, USSR

    S. V. Teplov & V. P. Shestov

Authors
  1. S. V. Teplov
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  2. V. P. Shestov
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Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 3, pp. 9–12, March, 1985.

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Teplov, S.V., Shestov, V.P. Experimental investigation of the energy distribution of sputtered excited target atoms bombarded by medium-energy ions. Soviet Physics Journal 28, 182–184 (1985). https://doi.org/10.1007/BF00895899

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  • DOI: https://doi.org/10.1007/BF00895899

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