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Dielectric properties of supermultilayer films based on silicon and germanium oxides

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Literature cited

  1. Yu. D. Pankov, V. A. Kamin, and Yu. V. Pestov, Mikroélektronika,2, 467 (1973).

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  2. Yu. D. Pankov, V. A. Kamin, and Yu. V. Pestov, in: Proc. of the All-Union Conf. on the Physics of Dielectrics and the Perspectives of Its Development, Vol. 3, 79 (1973).

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  3. Yu. D. Pankov, V. A. Kamin, and Yu. V. Pestov, Abstr. VINITI, No. 1610-74 Dep.

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Authors and Affiliations

  1. Gor'kov Physicotechnical Research Institute, USSR

    Yu. D. Pankov, V. A. Kamin, Yu. V. Pestov & S. S. Andreev

Authors
  1. Yu. D. Pankov
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  2. V. A. Kamin
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  3. Yu. V. Pestov
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  4. S. S. Andreev
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Additional information

Translated from Izvestiya Vysshikh. Uchebnykh Zavedenii, Fizika, No. 10, pp. 135–137, October, 1975.

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Pankov, Y.D., Kamin, V.A., Pestov, Y.V. et al. Dielectric properties of supermultilayer films based on silicon and germanium oxides. Soviet Physics Journal 18, 1473–1475 (1975). https://doi.org/10.1007/BF00895808

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  • DOI: https://doi.org/10.1007/BF00895808

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