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Soviet Physics Journal

, Volume 33, Issue 11, pp 973–977 | Cite as

Energy distributions and emission coefficients of secondary ions ejected from AIIIBV group semiconductors

  • A. G. Koval'
  • B. M. Fizgeer
  • V. A. Litvinov
Physics of Semiconductors and Dielectrics
  • 18 Downloads

Abstract

The energy distributions of Ga+ and Ga2+ secondary ions sputtered from the surface of single crystals of GaAs and GaP by Ar+ (E = 18 keV, j = 1·10−6 A/cm2) ions were studied. Integral emission coefficients for secondary ions from four semiconductors (GaAs, GaP, InAs, and A10.35Ga0.65As) bombarded by Ar+ ions (E = 2 keV, j0 = 1·10−6 A/cm2) were also measured. It is shown that the energy distribution of the Ga+ secondary ions are broad and qualitatively similar to distributions of secondary ions sputtered from metal oxide surfaces. Very high integral emission coefficients (up to 20–30%) for secondary ions are also observed, exceeding analogous coefficients for clean metal surfaces. These facts (the significant number of low energy secondary electrons and high secondary ion emission coefficients) are due to the lower density of free electrons in comparison with metals, which ensures a high degree of survival of sputtered ions, and the partially ionic character of the bonds in the semiconductors under study.

Keywords

GaAs Metal Oxide Energy Distribution Free Electron Oxide Surface 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Literature cited

  1. 1.
    G. Blaise and G. Slodzian, Rev. Phys. Appl.,8, 105 (1973).Google Scholar
  2. 2.
    K. J. Snowdon and R. J. MacDonald, Int. J. Mass Spectrom. Ion Phys.,28, 233 (1978).Google Scholar
  3. 3.
    M. A. Rudat and G. H. Morrison, Surf. Sci.,82, 549 (1979).Google Scholar
  4. 4.
    K. J. Snowdon, Corrosion Sci.,20, 53 (1980).Google Scholar
  5. 5.
    A. R. Bayly and R. J. MacDonald, Radiat. Eff.,34, 169 (1977).Google Scholar
  6. 6.
    A. G. Koval', B. M. Fizgeer, and V. A. Litvinov, Kharkov State University, Kharkov, 1986. Dep. at UkrNIINTI April2,1986, No. 962-Ukr.Google Scholar
  7. 7.
    V. T. Cherepin and M. A. Vasil'ev, Secondary Ion-Photon Emission of Metals and Alloys [in Russian], Naukova Dumka, Kiev (1975).Google Scholar
  8. 8.
    V. I. Veksler, Secondary Ion Emission in Metals [in Russian], Nauka, Moscow (1978).Google Scholar
  9. 9.
    V. N. Mel'nikov, Dissertation for Degree in Physics and Mathematical Sciences, Kharkov, Uzhgorod (1987).Google Scholar
  10. 10.
    A. G. Koval', B. M. Fizgeer, and V. A. Litvinov, Kharkov State University, Kharkov, 1986. Dep. at UkrNIINTI November 15,1986, No. 2620-Ukr.Google Scholar
  11. 11.
    Inventor's Certificate No. 1,292,071 USSR, MKI” NOJ 49/26, G01 No. 27/62, V. A. Litvinov, B. M. Fizgeer, and A. G. Koval', 3870991/24-21. Announced March 22, 1985. Published in Byull. Izobret.,1987, No. 7.Google Scholar
  12. 12.
    V. V. Korablev, S. E. Strakovskaya, S. G. Ershov, and I. E. Lesheva, Pis'ma Zh. Tekh. Fiz.,1, No. 2, 1282 (1981).Google Scholar
  13. 13.
    V. V. Nemoshkalenko, V. G. Aleshin, L. G. Gassanov, et al., Pverkhnost': Fiz., Khim., Mekh., No. 2, 88 (1983).Google Scholar
  14. 14.
    Yu. V. Slyusarenko, V. F. Bibik, K. D. Demakov, et al., Poverkhnost': Fiz., Khim., Mekh., No. 2, 32 (1986).Google Scholar
  15. 15.
    W. Ranke and K. Jacobi, Surf. Sci.,63, No. 1, 33 (1977).Google Scholar
  16. 16.
    A. G. Arakelov, V. F. Bibik, K. D. Demakov, et al., Ukr. Fiz. Zh.,30, No. 3, 411 (1985).Google Scholar
  17. 17.
    S. S. Batsanov, Structural Refractometry [in Russian], Vysshaya Shkola, Moscow (1976).Google Scholar
  18. 18.
    P. I. Baranskii, V. P. Klochkov, and I. V. Potykevich, Handbook of Semiconductor Electronics [in Russian], Naukova Dumka, Kiev (1975).Google Scholar
  19. 19.
    F. P. Kesamanly and D. M. Nasledov (eds.), Gallium Arsenide. Preparation, Properties, and Applications [in Russian], Nauka, Moscow (1973).Google Scholar
  20. 20.
    P. Williams, Surf. Sci.,90, 588 (1979).Google Scholar
  21. 21.
    N. N. Sirota and E. M. Gololobov, Dokl. Akad. Nauk SSSR,138, 162 (1961).Google Scholar
  22. 22.
    C. Plog and W. Gerhard, Z. Phys.,B54, 71 (1983).Google Scholar
  23. 23.
    G. Thomas, Radiat. Eff.,31, 185 (1977).Google Scholar
  24. 24.
    R. Berish (ed.), Sputtering of Solids by Ion Bombardment [Russian translation], Vol. 1, Mir, Moscow (1984), p. 336.Google Scholar

Copyright information

© Plenum Publishing Corporation 1991

Authors and Affiliations

  • A. G. Koval'
    • 1
  • B. M. Fizgeer
    • 1
  • V. A. Litvinov
    • 1
  1. 1.Gorky State UniversityKharkov

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