Skip to main content
SpringerLink
Log in

Electrical conductivity of an Al-Al2O3-Al thin-film MOS structure

  • Brief Communications and Letters to the Editor
  • Published:
Soviet Physics Journal Aims and scope

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

We’re sorry, something doesn't seem to be working properly.

Please try refreshing the page. If that doesn't work, please contact support so we can address the problem.

Literature cited

  1. G. G. Roberts and J. I. Polanco, Phys. Status Solidi,A1, 109 (1970).

    Google Scholar 

  2. N. A. Raikerus, Radiotekh. Elektron.,16, 400 (1971).

    Google Scholar 

  3. D. I. Barbe and H. F. Rae, J. Vac. Sci. Technol.,9, 70 (1972).

    Google Scholar 

  4. M. R. Boon, Thin Solid Films,9, 457 (1972).

    Google Scholar 

  5. P. N. Murgatroyd, J. Phys. D. Appl. Phys.,3, 151 (1970).

    Google Scholar 

  6. H. Gobrecht and D. Hofmann, J. Phys. Chem. Solids,27, 509 (1966).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. M. I. Kalinin Leningrad Polytechnic Institute, USSR

    A. A. Zadova & V. Ya. Kunin

Authors
  1. A. A. Zadova
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. Ya. Kunin
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 4, pp. 130–131, April, 1978.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Zadova, A.A., Kunin, V.Y. Electrical conductivity of an Al-Al2O3-Al thin-film MOS structure. Soviet Physics Journal 21, 520–521 (1978). https://doi.org/10.1007/BF00895563

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00895563

Keywords

Search

Navigation