Abstract
An hf discharge in CCl4, is studied by probe and optical emission spectroscopy. The experiments were performed in a diode type reactor in which a discharge was maintained at a frequency of 440 kHz. A measurement method based on simultaneous use of single and double probes is described. The plasma was studied spectrographically to identify radicals present in the CCl4 hf discharge.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 9, pp. 5–8, September, 1990.
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Avtyushkov, A.P. Parameters of an hf discharge in carbon tetrachloride. Soviet Physics Journal 33, 723–726 (1990). https://doi.org/10.1007/BF00894888
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DOI: https://doi.org/10.1007/BF00894888